Aixtron announced today that Shanghai University ordered a BM R&D reactor that will be used for graphene and CNT research at the University's Sino-Sweden Microsystem Integration Technology Center (SMIT).

The University researchers will use this new reactor for their research into CNT and graphene application using thermal- and plasma-based chemical vapor deposition (CVD). The researchers aim to develop next generation thermal interface/dissipating materials, heat spreaders, multi-chip interconnects and through silicon vias (TSV) for semiconductor chip packaging.